Nano-localization of Photochemical Polishing Processes of the Dielectrics Surface Via an Optical Near Field
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Abstract
The method of polishing a surface of a quartz substrate with a nanometer scale of roughness was investigated, using the phenomenon of optical dipole-dipole interaction of atomic chlorine with quartz. Atomic chlorine is obtained by photodissociation of molecular chlorine via an optical near field of nanoinhomogeneities of a quartz substrate. The formation of the evanescent wave on the substrate surface occurs when the substrate is irradiated at an angle of total internal reflection directed to the lower surface of the substrate. The evanescent wave polarizes the atoms of the chlorine and quartz particles, and directs them to the most effective way for photochemical sub-nano-polishing.
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